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LPS2000 - Copper LCVD Unit
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APPLICATIONS

Mixed analogue/digital IC repair

Integrated circuit failure analysis

Laser drilling of vias into various electronics materials (polyimides, ceramics etc.)

Deposition of bonding and probing pads directly to IC's silicon surface

Consultation services for microelectronics and microelectronics

Laser micromachining

LabView programming services

Production tester design



IC modification services


Fast-turnaround ASIC prototype series have to be brought onto the market quickly. Unfortunately, it is often noticed that, despite rigorous simulations, design flaws appear in these circuits, either because of a design fault or because of some processing error or deviation (mask error, metallurgic deposition failure etc.). These flaws can usually only be corrected by redesigning the layout and putting the IC through the semiconductor fabrication process again, which is costly and time-consuming.

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Malfunctions observed in the prototype ICs are typically precluding the device design testing before launching the final production. Being a fast method the LaserProbe System helps the designers to overcome the difficulties at the prototyping stage.

We also provide a full service of decapsulation of IC packages.


Unique low resistance copper rewirings (LPS 2000)

Various techniques have been developed to carry out integrated circuit repairs during IC prototyping. Focused ion beam etching and deposition is, for the time being, the most powerful and versatile tool for multilevel IC modification and failure analysis but a long distance conductur line deposition with an acceptable electrical resistance is very time consuming and costly. Laser chemical vapor deposited copper rewirings (LCVD) have extremely low bulk resistivity (2.7uohmcm) with high growth rate. These rewired signal lines and their features offer new solutions to the IC modifications.

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In some cases, it is possible to modificate the circuitry so that the probing of the IC can be done using external unused pins of the case. This is performed using a pad deposition (100x100mm^2) and normal rewiring procedure. A Cu pad thickness of approximately 1 um is required for the Au wedge bonding. Typically, utilisation of spare pins of the case helps and simplifies the functional testing and probing of the IC's malfunction. Figure below shows a malfunction probing performed on a SiO2 passivated IC.

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LPS2000 system utilises the developed direct write of polysilicon (1986-1989) and nickel (1994-1995) processes. LaserProbe utilises also Focused Ion Beam (FIB) technology for ASIC modification cases and sample analysis and preparation. By combining these two techniques (LCVD of LPS2000 and FIB) LaserProbe meets the most challenging modification requirements for both analogue and digital circuits.


How to order a modification work?

Please find instructions from here...




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